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Reclaim Capability

Items Remark
Bare  
SiO2  
SiN  
Poly Si  
Diffused Wafer  
Epitaxial Wafer  
Resist  
Metal Ti,TiN,Ta,TaO,TaN,Al,W,AlCu,etc.
Patterned Wafer  
Cu 300mm available
Low-K  
High-K  
GaN Film  
SiC Film  
Lithography Grade  
Chemical Reclaim Bare,SiO2,Resist,etc.

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